The middle-of-line (MOL) comprises the layers in a chip that connect the transistors to the back-end-of-line (BEOL), which comprises the metal interconnect layers, starting with metal 1 (M1). While the BEOL lines tend to extend over long distances, forming a predominantly unidirectional layout, the MOL features tend to be dense in both x and y directions, due to confinement b...
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Multiple Patterns: Multiple Patterns | Frederick Chen | Substack